Multi-gate carbon nano-tube transistors

ABSTRACT

According to one aspect of the invention, a semiconducting transistor is described. The channel portion of the transistor includes carbon nanotubes formed on top of an insulating layer which covers a local bottom gate. Source and drain conductors are located at ends of the carbon nanotubes. A gate dielectric surrounds a portion of the carbon nanotubes with a substantially uniform thickness. A local top gate is located between the source and drain conductors over the carbon nanotubes. Lower portions of the local top gate are positioned between the carbon nanotubes as the local top gate forms pi-gates or “wraparound” gates around each carbon nanotube.

This is a Divisional Application of Ser. No. 10/402,780 filed Mar. 28,2003, which is presently pending.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation-in-part of prior U.S. patent application Ser. No.10/227,068, filed on Aug. 28, 2002.

BACKGROUND

1). Field of the Invention

Embodiments of the present invention relate to the field ofsemiconductor integrated circuits, and more particularly to a multi-gatecarbon nanotube transistor.

2). Discussion of Related Art

Integrated circuits used in modern computers are formed on semiconductorwafers. The wafers are then sawed into semiconductor chips also known asmicroelectronic dies. Semiconductor chips include literally millions ofsemiconductor transistors formed on top of what was once thesemiconductor wafer.

Each transistor includes a source conductor, a drain conductor, at leastone gate electrode, and a semiconducting channel. The semiconductingchannel will conduct electricity only when it is placed in an electricfield. A voltage is constantly applied across the source and drainconductors which are separated by the channel which normally will notconduct electricity, so that the transistor is off. Current will onlyconduct from the source to the drain if a threshold voltage is appliedto the gate electrode to create an electric field strong enough to causethe channel to conduct electricity to switch the transistor on.

The use of carbon nanotubes as channels in transistors has been studiedin recent years. However, the nanotubes have not performed considerablybetter than traditional semiconducting channels when they are used withconventional gate structures.

BRIEF DESCRIPTION OF THE DRAWINGS

An embodiment of the invention is described by way of examples withreference to the accompanying drawings, wherein:

FIG. 1 is a perspective view of a multi-carbon nanotube double gatetransistor;

FIG. 2 is a perspective view of a silicon substrate;

FIG. 3 is a perspective view of the silicon substrate with a firstinsulating layer formed thereon;

FIG. 4 is a perspective view of the silicon substrate with a localbottom gate formed on top of the first insulating layer;

FIG. 5 is a perspective view of the silicon substrate with a secondinsulating layer formed over the local bottom gate and the firstinsulating layer;

FIG. 6 is a perspective view of the substrate with iron catalysts havingbeen formed on the second insulating layer;

FIG. 7 is a perspective view of the silicon substrate with carbonnanotubes having been grown from the iron catalysts;

FIG. 8 is a perspective view of the substrate with source and drainconductors having been formed at the ends of the carbon nanotubes;

FIG. 9 is a perspective view of the substrate with a third insulatinglayer having been formed over the source and drain conductors and thecarbon nanotubes;

FIG. 10 is a perspective view of the multi-carbon nanotube double gatetransistor;

FIG. 11 is a cross sectional side view on 11-11 in FIG. 10 of themulti-carbon nanotube double gate transistor;

FIG. 12 is a cross sectional side view on 12-12 in FIG. 10 of themulti-carbon nanotube double gate transistor;

FIG. 13 is a perspective view of a multi-carbon nanotube triple gatetransistor;

FIG. 14 is a cross sectional side view on 14-14 in FIG. 13 of themulti-carbon nanotube triple gate transistor; and

FIG. 15 is a cross sectional side view on 15-15 in FIG. 13 of themulti-carbon nanotube triple gate transistor.

DETAILED DESCRIPTION

FIG. 1 to FIG. 15 of the accompanying drawings illustrate twoembodiments of a semiconductor transistor. The channel portion of thetransistor includes carbon nanotubes formed on top of an insulator,insulating layer, or gate dielectric which covers a local bottom gate.Source and drain conductors are located at ends of the carbon nanotubes.Another insulator surrounds a portion of the carbon nanotubes with asubstantially uniform thickness. A local top gate is located between thesource and drain conductors over the carbon nanotubes. Lower portions ofthe local top gate are positioned between the carbon nanotubes as thelocal top gate forms pi-gates or “wraparound” gates around each carbonnanotube.

FIG. 1 illustrates a multi-carbon nanotube double gate transistor 20.The multi-carbon nanotube double gate transistor 20 includes a siliconsubstrate 22, a first insulating layer 24, a local bottom gate 26, asecond insulating layer 28, a source conductor 30, a drain conductor 32,a third insulating layer 34, and a local top gate 36.

FIG. 2 illustrates the silicon substrate 22. The silicon substrate 22 ismade of monocrystalline silicon has a thickness 38 of 75 microns and anupper surface 40.

FIG. 3 illustrates the substrate 22 with the first insulating layer 24,or gate dielectric thereon. The first insulating layer 24 is made ofsilicon oxide has a thickness 42 of 100 nanometers and an upper surface44. The first insulating layer 24 is formed on the upper surface 40 ofthe silicon substrate 22 by chemical vapor deposition (CVD).

FIG. 4 illustrates the substrate 22 with the local bottom gate 26, orgate electrode, formed on top of the first insulating layer 24. Thelocal bottom gate 26 has a length 46 of 1000 nanometers and a thickness48 of 250 nanometers and is made of tungsten. The local bottom gate 26is formed by CVD on a central region of the upper surface 44 of thefirst insulating layer 24 leaving exposed portions 50 of the uppersurface 44 of the first insulting layer 24.

FIG. 5 illustrates the substrate 22 with the second insulating layer 28,or gate dielectric, over and adjacent to the local bottom gate 26. Thesecond insulating layer 28 is made of zirconium oxide and has a maximumthickness 52 of 300 nanometers over the exposed portions 50 of the uppersurface 44 of the first insulating layer 24. The second insulating layer28 has an upper surface 54 with a source portion 56 and a drain portion58. The source portion 56 and the drain portion 58 are at laterallyopposing sides of the local bottom gate 26.

FIG. 6 illustrates the substrate 22 with iron catalysts 60 deposited onthe second insulating layer 28. The iron catalysts 60 are located on thedrain potion 58 of the upper surface 54 of the second insulating layer28. The catalysts 60 are deposited over a layer of photoresist havingsmall holes in it, which is temporarily formed on the second insulatinglayer 28. The catalysts 60 settle into the holes and remain on thesecond insulating layer 28 when the photoresist layer is removed. Eachcatalyst consists of a single nanoparticle of iron.

FIG. 7 illustrates the substrate 22 with single walled semiconductingcarbon nanotubes 62 grown on the upper surface 54 of the secondinsulating layer 28. The carbon nanotubes 62 are cylindrical with curvedouter surfaces 64 having diameters 66 of between 1 and 2 nanometers,lengths 68 between 500 and 1,000 nanometers, and have primary elongateaxes 70. Each carbon nanotube 62 include a source end 72, a drain end74, and a channel portion 76 which is between the source end 72 and thedrain end 74. The carbon nanotubes 62 are grown from and chemicallybonded to the iron catalysts 60 by CVD. The carbon nanotubes 62 extendfrom the drain portion 58 of the upper surface 54 of the secondinsulating layer 28 to the source portion 56. The elongate axes 70 areparallel to each other and the upper surface 40 of the substrate 22. Theparallel orientation can be achieved by applying an electric fieldduring the growing process.

FIG. 8 illustrates the substrate 22 with the source 30 and drain 32conductors formed on the second insulating layer 28. The source 30 anddrain 32 conductors have thicknesses 78 of 300 nanometers, are made of amixture of titanium and aluminum, and have a distance between them of800 nanometers. The source 30 and drain 32 conductors are formed by CVD.The source conductor 30 is on the source portion 56 of the upper surface54 of the second insulating layer 28 and over the source ends 72 of thecarbon nanotubes 62. The drain conductor 32 is on the drain portion 58of the upper surface 54 of the second insulating layer 28 and over thedrain ends 74 of the carbon nanotubes 62. The channel portions 76 of thecarbon nanotubes 62 are not covered by the source 30 and drain 32conductors.

FIG. 9 illustrates the substrate 22 with the third insulating layer 34,or gate dielectric, formed over the source 30 and drain 32 conductors.The third insulating layer 34 is formed by CVD over the source 30 anddrain conductors 32 and channel portions 76 of the carbon nanotubes 62.The third insulating layer 34 is made of zirconium oxide and has asubstantially uniform thickness 80 of 1-5 nanometers. The thirdinsulating layer 34 has conformed to the curved outer surfaces 64 of thecarbon nanotubes 62 and now has curved portions 82 and depressions 84between the curved the portions 82 over the channel portions 76 of thecarbon nanotubes 62. The third insulating layer 34 has an upper surface86 and a trench 88 that extends between the source 30 and drain 32conductors over the channel portions 76 of the carbon nanotubes 62.

FIG. 10 illustrates the substrate 22 with the local top gate 36, or gateelectrode, formed on the third insulating layer 34. The local top gate36 is made of aluminum and has a thickness 90 of 300 nanometers. Thelocal top gate 36 has been formed by CVD into the trench 88 of the uppersurface 86 of the third insulating layer 34, over the channel portions76 and source 72 and drain 74 ends of the carbon nanotubes 62, partiallyover the source 30 and drain 32 conductors, and adjacent to the thirdinsulating layer 34 to complete the multi-carbon nanotube double gatetransistor 20.

FIG. 11 illustrates the multi-carbon nanotube double gate transistor 20.The local top gate 36 has been connected to a first electric terminal 92and the local bottom gate 26 has been connected to a separate secondelectric terminal 94. The local top gate 36 and the local bottom gate 26are separated by the second and third insulating layers 28 and 34. Thelocal top gate 36 has formed to match the curved portions 82 anddepressions 84 of the upper surface 86 of the third insulating layer 34.Lower portions 96 of the local top gate 36 extend downward between thecarbon nanotubes 62. The third insulating layer 34 and the local topgate 36 are at a uniform distance to each of the carbon nanotubes 62.The local top gate 36 has formed multi-angle pi-gates 98, or“wraparound” gates, around each of the carbon nanotubes 62. Each pi-gate98 wraps around approximately 75 percent its respective carbon nanotube62.

FIG. 12 illustrates the multi-carbon nanotube double gate transistor 20.The carbon nanotubes 62 interconnect the source 30 and drain 32conductors. The source 30 and drain 32 conductors have been formed overthe respective source 72 and drain 74 ends of the carbon nanotubes 62.The local top gate 36 is positioned over the channel portions 76 andsource 72 and drain 74 ends of the carbon nanotubes 62. The local bottomgate 26 is positioned beneath the local top gate 36 beneath the channelportions 76 of the carbon nanotubes 62.

Is use, a primary voltage is applied across the source 30 and drain 32conductors at all times. The insulating layers separate the source 30and drain 32 conductors from the local top 36 and bottom 26 gates. Thus,no current conducts through the carbon nanotubes 62 from the source 30to the drain 32 conductor if no voltage is applied to the local top 36and bottom gates 26, and the transistor is “off” because no currentconducts from the source conductor 30 to the drain conductor 32 sincethe carbon nanotubes 62 are not conductive.

When a voltage is applied to the local top 36 and bottom 26 gates, thecarbon nanotubes 62 act as conductors and a “channel” of the transistordue to the semiconducting properties of the carbon nanotubes 62. Thus,the transistor is “on” because current conducts from the sourceconductor 30 through the channel to the drain conductor 32 as the source30 and drain 32 conductors are electrically coupled. The pi-gates 98formed by the local top gate 36 act as multi-gates around each of thecarbon nanotubes 62.

One advantage is that the use of multiple gates increases gatecapacitance. The use of the pi-gates around each of the carbon nanotubechannels even further increases gate capacitance while utilizingconventional planar fabrication tools. Another advantage is thatelectron transport and electron mobility through the channel areimproved.

FIG. 13 illustrates a multi-carbon nanotube triple gate transistor 100.The multi-carbon nanotube quadruple gate transistor 100 includes asilicon substrate 102, a first insulating layer 104, a first localbottom gate 106, a second local bottom gate 108, a second insulatinglayer 110, a source conductor 112, a drain conductor 114, a thirdinsulating layer 116, and a local top gate 118.

FIG. 14 illustrates the multi-carbon nanotube triple gate transistor100. The local top gate 118 has been connected to a first electricterminal 120 and the first local bottom gate 106 has been connected to aseparate second terminal 122, and similarly, the second local bottomgate is connected to a third electric terminal. The local top gate 118and the local bottom gates are separated by the second and thirdinsulating layers 110 and 116. The local top gate 118 has formed tomatch the curved portions 82 and depressions 84 of the third insulatinglayer 116. The local top gate 118 has lower portions 124 extendingdownward between the carbon nanotubes 62. The third insulating layer 116and the local top gate 118 are at a uniform distance to each of thecarbon nanotubes 62. The local top gate 118 has formed multi-anglepi-gates 98, or “wraparound” gates, around each of the carbon nanotubes62. Each pi-gate 98 wraps around approximately 75 percent of itsrespective carbon nanotube 62.

FIG. 15 illustrates the multi-carbon nanotube triple gate transistor100. The local top gate 118 is connected to the first electric terminal120. The source conductor 112 has been formed over the source ends 72 ofthe carbon nanotubes 62 and the drain conductor 114 has been formed overthe drain ends 74 of the carbon nanotubes 62. The local top gate 118lies above the channel portions 76 and the source 72 and drain 74 endsof the carbon nanotubes 62. The first local bottom gate 106 and thesecond local bottom gate 108 lie beneath the channel portions 76 and thesource 72 and drain 74 ends of the carbon nanotubes 62 and areelectrically disconnected. The local top gate 118 directly opposes thefirst local bottom gate 106 and the second local bottom gate 108.

Is use, a primary voltage is applied across the source 112 and drain 114conductors at all times. The insulating layers separate the source 112and drain 114 conductors from the local top and bottom gates. Thus, nocurrent conducts through the carbon nanotubes 62 from the source 112 tothe drain 114 conductor if no voltage is applied to the local top andbottom gates, and the transistor is “off” because no current conductsfrom the source conductor 112 to the drain conductor 114 since thecarbon nanotubes 62 are not conductive.

When a first voltage is applied to the local top gate 118 the carbonnanotubes 62 act as conductors due to the semiconducting properties ofthe carbon nanotubes 62. Similarly, when a second voltage is applied tothe first local bottom gate 106, portions of the carbon nanotubes 62above the first local bottom gate 106 act as conductors, and when athird voltage is applied to the second local bottom gate 108, portionsof the carbon nanotubes above the second local bottom gate 108 act asconductors. The local bottom gates are connected to different electricterminals so that the portions of the carbon nanotubes 62 between therespective local bottom gates and the local top gate 118 can becontrolled separately.

When the first voltage is applied, or both the second and third voltagesare applied at the same time, the transistor is “on” because currentconducts from the source conductor 112 through the channel to the drainconductor 114 as the source 112 and drain 114 conductors areelectrically coupled. The pi-gates 98 formed by the local top gate 118act as multi-gates around each of the carbon nanotubes 62.

One advantage is that the use of multiple gates increases gatecapacitance. The use of the pi-gates around each of the carbon nanotubechannels even further increases gate capacitance while utilizingconventional planar fabrication tools. Another advantage is thatelectron transport and electron mobility through the channel areimproved. A further advantage is that different segments of the carbonnanotube can be controlled at different times to improve the performanceand realize more functions of the transistor.

Other embodiments of the invention may use different configurations ofthe carbon nanotubes such as having the carbon nanotubes stacked in acolumn with the elongate axes still being parallel to each other and thesubstrate. The pi-gates may surround a different percentage of thecarbon nanotubes. If the local top gate includes the pi-gates, a bottomgate may not be needed. Other types of gates not utilizing the pi-gatesmay be used including double gates, vertical double gates, planarmulti-gates, vertical triple gates which may or may not include a bottomgate, and quadruple gates which may include a plurality of local top andbottom gates being electrically disconnected from one another. Thequadruple gate embodiment may have the gates arranged in pairs with eachgate in a pair opposing the other. A single carbon nanotube may be usedas the transistor channel. The insulating layers, or gate dielectricportions, may be made of different materials such as aluminum oxide andtantalum oxide. The semiconducting carbon nanotubes need not be grownbut may be positioned on the substrate, and the source and drainconductors may be formed over the respective source and drain ends.Different catalysts may be used to grow the carbon nanotubes such ascobalt, nickel, rhodium platinum, nickel yttrium, or any combinationthereof. The source and drain conductors as well as the gates, or gateelectrodes, can be made of various materials such as titanium, copper,gold, tungsten, or combination thereof. Alternative techniques can beused to grow the carbon nanotubes including discharge between carbonelectrodes, laser vaporation of carbon, thermal decomposition ofhydrocarbons such as acetylene, methane, ethane, and plasma enhancedchemical vapor deposition (PECVD).

While certain exemplary embodiments have been described and shown in theaccompanying drawings, it is to be understood that such embodiments aremerely illustrative and not restrictive of the current invention, andthat this invention is not restricted to the specific constructions andarrangements shown and described since modifications may occur to thoseordinarily skilled in the art.

1-27. (canceled)
 28. A method for constructing a semiconductortransistor, comprising: forming a local bottom gate electrode on asubstrate; forming an insulating layer on the bottom gate electrode;positioning a semiconducting carbon nanotube on the insulating layerover the local bottom gate electrode, the semiconducting carbon nanotubehaving an elongate axis, source and drain ends, and a channel portionbetween the source and drain ends; forming source and drain conductorsover the respective source and drain ends of the semiconducting carbonnanotube; forming a gate dielectric on the source and drain conductorsand the channel portion of the semiconducting carbon nanotube; andforming a local top gate electrode over the channel portion of thesemiconducting carbon nanotube, the local top gate electrode, in atleast one cross-section transverse to the elongate axis of thesemiconducting carbon nanotube, being electronically disconnected fromthe local bottom gate electrode, the local bottom gate electrode and thelocal top gate electrode being located such that when a voltage isapplied to the local top and bottom gate electrodes, the source anddrain conductors electrically coupled through the semiconducting carbonnanotube.
 29. The method of claim 28, wherein the semiconducting carbonnanotube has a curved outer surface, the gate dielectric being adjacentto the curved outer surface of the semiconducting nanotube, only aportion of the gate dielectric having a curved outer gate dielectricsurface.
 30. The method of claim 29, wherein the portion of the gatedielectric with the curved outer gate dielectric surface has asubstantially uniform thickness.